355m² Cleanroom for Pfeiffer Benelux

Case study:

The PanelBloc cleanroom

This PanelBloc cleanroom of approximately 355m², featuring ISO Class 6 & 7 certification, was installed at Pfeiffer Vacuum Benelux B.V. in their Culemborg facility. Pfeiffer Vacuum+Fab Solutions, a global operating enterprise with a legacy dating back to 1890, provides leading tailored solutions for the semiconductor industry, analytics, research, and various specialized applications.

Pfeiffer Vacuum Benelux expanded its cleanroom infrastructure significantly to fulfill the stringent requirements of a key account within the high-tech sector. The necessity for expansion was directly tied to increasing technical complexity and growing workload generated by this semiconductor industry leader.

355m² Cleanroom for Pfeiffer Benelux — 1

355m² Cleanroom for Pfeiffer Benelux — 2

355m² Cleanroom for Pfeiffer Benelux — 3

355m² Cleanroom for Pfeiffer Benelux — 4

Cleanroom built for next-generation servicing

According to Peter Spierenburg, Service Manager Benelux at Pfeiffer Vacuum, “working for such a client means we must seek additional depth in execution.” The company manufactures a specialized helium leak detector engineered for integration with the client's next-generation lithography systems. As demand escalated for both equipment supply and ongoing servicing of these specialized units, Pfeiffer recognized the need for dedicated, specialized capacity.

Addressing this development, the company initiated technical specifications approximately three years ago for an advanced, expanded cleanroom facility. The goal was to align the site completely with the client's rigorous standards. This proactive strategy resulted in constructing an entirely new 355m² ISO Class 6/7 cleanroom. This substantial capital investment ensures Pfeiffer Vacuum can deliver the required dedicated, highly specialized servicing and support demanded by its critical semiconductor industry accounts.

Purpose-driven engineering and verified molecular cleanliness

Eighty percent of the cleanroom workstations are operationally partitioned and specifically configured to achieve Grade 2 cleanliness standards. Servicing workflows for helium leak detectors are streamlined: upon arrival, equipment is disassembled, cleaned, serviced, and reassembled—all within the same controlled environment.

Following maintenance, helium leak detectors undergo a mandatory 24-hour outgassing phase, followed by a two-stage evaluation protocol. The initial test verifies operational factory specifications; the second involves Residual Gas Analysis (RGA) using an Omnigrade RGA system to verify Grade 2 molecular cleanliness compliance. Specialized testing systems required for this procedure were engineered and manufactured in-house by Pfeiffer.

However, evolving insights regarding the new testing apparatus necessitated substantial modifications during the construction phase. Flexibility from ProCleanroom proved essential, as thermal loads generated by the new equipment exceeded initial projections, posing a risk of exceeding required temperature limits. Necessary design revisions were executed promptly to maintain climate control and full regulatory compliance. Furthermore, specialized utilities were strategically integrated throughout designated zones of the facility to ensure optimal process execution, maximum cleanliness, and operational safety for personnel.

Precision material handling via specialized cleanroom cranes

To ensure safe, precise handling of heavy components within the cleanroom, the facility is equipped with dedicated overhead hoisting infrastructure. This system incorporates two complete cleanroom crane systems and one static hoisting point—providing three hoisting stations uniformly rated for a 250 kg lifting capacity.

This specialized infrastructure is critical for operational efficiency and contamination control. Dual crane systems deliver flexible coverage across workstations, enabling precise positioning of assemblies from disassembly through testing. Simultaneously, the fixed hoist point is strategically positioned for tasks demanding maximum vertical precision at a specific workstation.

Project management and total solution execution

ProCleanroom delivered a full-service turnkey solution, managing the entire project scope. From piping infrastructure to specialized inspection lighting, every operational detail was executed. This comprehensive turnkey management encompassed engineering consultation, design, installation, validation, fit-out, and consumable provisioning. A key operational feature is the integration of dedicated UV-A inspection suites, ensuring potential contamination is detected during cleaning and packaging steps to guarantee compliance with strict Grade 2 cleanliness standards.

Outfitting and Consultation

Outfitting and consultation for selecting the proper cleanroom consumables tailored to Pfeiffer's operational workflow were fully executed by ProCleanroom's Accessories & Consumables division. Working closely with Pfeiffer, specialists evaluated requirements to assemble a tailored product package. Running this process concurrently with cleanroom construction allowed the space to be outfitted and operational immediately upon handover.

Direct benefits for the user:

Complete turnkey solution – design, installation, ISO validation, garments, and furniture: a single point of contact.
Maximum cleanliness performance thanks to fully flush walls and ceiling.
Premium aesthetic appearance for client and supplier presentations.
Lowest power consumption and operational costs in the market.

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